Fabrication

The ITC Fabrication Facility offers reliable, MEMS production from pilot to mid-volume by leveraging flexible process development and prototyping – all in a single integrated setting. While MEMS regularly create major cost and/or performance breakthroughs for the products they enable, MEMS themselves are rarely “off-the-shelf”. Every solution is inherently custom. The challenge is to develop scalable fabrication processes on time and on budget.

We balance MEMS requirements with customer business goals by optimizing the best available microfabrication approaches and production equipment. See full equipment summaries.

Key customer advantages:

• High flexibility in project size
• Wide variety of wafer substrates (silicon, SOI, quartz, glass, metal, polyimides)
• Vertically integrated design and fabrication teams maximize device performance, reduce errors, and compress schedule times.
• Skilled support for process transfers / integration where required.
• In-house metrology and packaging.